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KEK測定器開発室では以下の内容セミナーを開催します。

今回はCathal Cassidy氏をお招きして、Device development and microscopy:  
Case studies on TSV development and in situ TEMと題してご講演いただきます。
奮ってご参加ください。

TV会議システム等での中継も可能です。
ご希望の方は担当者までお問い合わせください。

                          KEK測定器開発室
======================================================================
            測定器開発室セミナー

Date     :  April 23, 13:30~
Location :  meeting room in 4th floor, bldg. 3 (425)
Title    :  Device development and microscopy:  Case studies on TSV 
            development and in situ TEM
Speaker  :  Prof. Cathal Cassidy氏(OIST)

Abstract:
In the first part of this talk, I will introduce the 3D sensor-CMOS
integration technology that we developed at ams AG in the period from
2006-2012, for medical imaging application.   I will discuss process
development, structure, microscopy, and strengths and limitations of the
technology.  In the second part of the talk, I will discuss activities at OIST
in the period 2012-2015, with a focus on advanced electron microscopy
capabilities and results.  These include semiconductor nanoparticle TEM and
GPA strain analysis, high temperature TEM, holography, and in operando device
TEM.  In conclusion, I will briefly mention possible topics for future
research in CMOS-detector technology.

Contact: Yasuo Arai(arai.yasuo -at- kek.jp)